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Kazuhiro Aiura

TL Tokyo Electron Limited: 4 patents #34 of 744Top 5%
Overall (2017): #44,090 of 506,227Top 9%
4
Patents 2017

Issued Patents 2017

Showing 1–4 of 4 patents

Patent #TitleCo-InventorsDate
9768010 Liquid treatment apparatus Norihiro Ito, Naoki Shindo, Yosuke Hachiya 2017-09-19
9768039 Substrate processing apparatus Norihiro Ito, Hidetoshi Nakao, Kazuyoshi Shinohara, Satoru Tanaka, Yuki Yoshida +1 more 2017-09-19
9691602 Liquid process apparatus and liquid process method Norihiro Ito, Naoki Shindo, Yosuke Hachiya, Takashi Nagai 2017-06-27
9640383 Liquid treatment apparatus and liquid treatment method Norihiro Ito, Takashi Nagai 2017-05-02