Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9805957 | Substrate processing apparatus, substrate processing method and computer-readable storage medium recording therein substrate processing program | Yosuke Kawabuchi, Hisashi Kawano, Satoru Tanaka, Hiroyuki Suzuki, Kotaro Oishi +1 more | 2017-10-31 |
| 9764345 | Substrate processing apparatus and nozzle cleaning method | Yoshihiro Kai, Yoshinori Ikeda, Tetsuya Oda, Satoru Tanaka, Yuki Yoshida +1 more | 2017-09-19 |
| 9768039 | Substrate processing apparatus | Kazuhiro Aiura, Norihiro Ito, Hidetoshi Nakao, Satoru Tanaka, Yuki Yoshida +1 more | 2017-09-19 |