Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9764345 | Substrate processing apparatus and nozzle cleaning method | Yoshihiro Kai, Kazuyoshi Shinohara, Tetsuya Oda, Satoru Tanaka, Yuki Yoshida +1 more | 2017-09-19 |
| 9631712 | Electric linear actuator | — | 2017-04-25 |
| 9574648 | Electric linear actuator | Kensuke Funada | 2017-02-21 |
| 9577050 | Semiconductor laminate, semiconductor device, and production method thereof | Yuka Tomizawa, Tetsuya Imamura | 2017-02-21 |