Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9842751 | Substrate liquid processing apparatus | Shouta Umezaki, Kazuki Kosai, Mitsuo Tanaka | 2017-12-12 |
| 9764345 | Substrate processing apparatus and nozzle cleaning method | Yoshinori Ikeda, Kazuyoshi Shinohara, Tetsuya Oda, Satoru Tanaka, Yuki Yoshida +1 more | 2017-09-19 |
| 9542031 | Input device using detection of both capacitance and pressure, and capacitance-system hybrid touch panel equipped with pressure-sensitive function | Junichi Shibata, Ryomei Omote, Yuko Endo | 2017-01-10 |