Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9818598 | Substrate cleaning method and recording medium | Meitoku Aibara, Yuki Yoshida, Masami Yamashita, Itaru Kanno, Kenji Mochida +1 more | 2017-11-14 |
| 9805957 | Substrate processing apparatus, substrate processing method and computer-readable storage medium recording therein substrate processing program | Yosuke Kawabuchi, Satoru Tanaka, Hiroyuki Suzuki, Kotaro Oishi, Kazuyoshi Shinohara +1 more | 2017-10-31 |