Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9818598 | Substrate cleaning method and recording medium | Meitoku Aibara, Yuki Yoshida, Hisashi Kawano, Masami Yamashita, Kenji Mochida +1 more | 2017-11-14 |
| 9799538 | Substrate cleaning system | Miyako Kaneko, Takehiko Orii | 2017-10-24 |