| 9852946 |
Self aligned conductive lines |
Sean D. Burns, Lawrence A. Clevenger, Matthew E. Colburn, Sivananda K. Kanakasabapathy, Yann Mignot +2 more |
2017-12-26 |
| 9786554 |
Self aligned conductive lines |
Sean D. Burns, Lawrence A. Clevenger, Anuja E. DeSilva, Nelson Felix, Sivananda K. Kanakasabapathy +3 more |
2017-10-10 |
| 9786603 |
Surface nitridation in metal interconnects |
Lawrence A. Clevenger, Terry A. Spooner, Wei Wang, Chih-Chao Yang |
2017-10-10 |
| 9780035 |
Structure and method for improved stabilization of cobalt cap and/or cobalt liner in interconnects |
Benjamin D. Briggs, James J. Kelly, Koichi Motoyama, Michael Rizzolo, Theodorus E. Standaert |
2017-10-03 |
| 9779944 |
Method and structure for cut material selection |
Sean D. Burns, Lawrence A. Clevenger, Matthew E. Colburn, Nelson Felix, Sivananda K. Kanakasabapathy +3 more |
2017-10-03 |
| 9773700 |
Aligning conductive vias with trenches |
Sean D. Burns, Lawrence A. Clevenger, Matthew E. Colburn, Sivananda K. Kanakasabapathy, Yann Mignot +2 more |
2017-09-26 |
| 9761655 |
Stacked planar capacitors with scaled EOT |
Takashi Ando, Lawrence A. Clevenger, Hemanth Jagannathan |
2017-09-12 |
| 9607886 |
Self aligned conductive lines with relaxed overlay |
Sean D. Burns, Lawrence A. Clevenger, Matthew E. Colburn, Sivananda K. Kanakasabapathy, Yann Mignot +2 more |
2017-03-28 |
