Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9466518 | Electrostatic chuck device | Shinichi Maeta, Mamoru Kosakai, Takeshi Otsuka | 2016-10-11 |
| 9412635 | Electrostatic chuck device | Yasuharu Sasaki, Kaoru Oohashi, Tomoyuki Takahashi, Tadashi Aoto, Mamoru Kosakai +3 more | 2016-08-09 |
| 9330953 | Electrostatic chuck device | Shinichi Maeta, Takashi Satou, Kei Furuuchi | 2016-05-03 |
| 9287156 | Electrostatic chucking device | Yoshiaki Moriya, Shinichi Maeta | 2016-03-15 |
| 9281276 | Semiconductor device and manufacturing method of the same | Tatsuya Usami, Hideaki Tsuchiya | 2016-03-08 |
| 9269600 | Electrostatic chuck device | Kazunori Ishimura, Mamoru Kosakai | 2016-02-23 |
| 9270147 | Stator and protecting member for stator | Kouji Nakatake, Masaaki Ohashi, Zhang Hong | 2016-02-23 |