Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9466518 | Electrostatic chuck device | Mamoru Kosakai, Yukio Miura, Takeshi Otsuka | 2016-10-11 |
| 9412635 | Electrostatic chuck device | Yasuharu Sasaki, Kaoru Oohashi, Tomoyuki Takahashi, Tadashi Aoto, Mamoru Kosakai +3 more | 2016-08-09 |
| 9330953 | Electrostatic chuck device | Yukio Miura, Takashi Satou, Kei Furuuchi | 2016-05-03 |
| 9287156 | Electrostatic chucking device | Yoshiaki Moriya, Yukio Miura | 2016-03-15 |