Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9343346 | Electrostatic chuck apparatus | Mamoru Kosakai, Kazunori Ishimura, Ryuuji Hayahara, Takeshi Watanabe, Yoshiaki Moriya +1 more | 2016-05-17 |
| 9332892 | Light converging type light guide unit and light source device using the same | Mitsuyuki Hatanaka, Nozomu Kajiwara, Takaaki Komiya | 2016-05-10 |
| 9330953 | Electrostatic chuck device | Yukio Miura, Shinichi Maeta, Kei Furuuchi | 2016-05-03 |