Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9412635 | Electrostatic chuck device | Yasuharu Sasaki, Kaoru Oohashi, Tomoyuki Takahashi, Tadashi Aoto, Mamoru Kosakai +3 more | 2016-08-09 |
| 9343346 | Electrostatic chuck apparatus | Mamoru Kosakai, Kazunori Ishimura, Takashi Satou, Ryuuji Hayahara, Takeshi Watanabe +1 more | 2016-05-17 |
| 9330953 | Electrostatic chuck device | Yukio Miura, Shinichi Maeta, Takashi Satou | 2016-05-03 |