Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9343346 | Electrostatic chuck apparatus | Mamoru Kosakai, Kazunori Ishimura, Takashi Satou, Takeshi Watanabe, Yoshiaki Moriya +1 more | 2016-05-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9343346 | Electrostatic chuck apparatus | Mamoru Kosakai, Kazunori Ishimura, Takashi Satou, Takeshi Watanabe, Yoshiaki Moriya +1 more | 2016-05-17 |