Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9343346 | Electrostatic chuck apparatus | Mamoru Kosakai, Takashi Satou, Ryuuji Hayahara, Takeshi Watanabe, Yoshiaki Moriya +1 more | 2016-05-17 |
| 9269600 | Electrostatic chuck device | Yukio Miura, Mamoru Kosakai | 2016-02-23 |