Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9343346 | Electrostatic chuck apparatus | Mamoru Kosakai, Kazunori Ishimura, Takashi Satou, Ryuuji Hayahara, Takeshi Watanabe +1 more | 2016-05-17 |
| 9287156 | Electrostatic chucking device | Yukio Miura, Shinichi Maeta | 2016-03-15 |