Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9466518 | Electrostatic chuck device | Shinichi Maeta, Yukio Miura, Takeshi Otsuka | 2016-10-11 |
| 9412635 | Electrostatic chuck device | Yasuharu Sasaki, Kaoru Oohashi, Tomoyuki Takahashi, Tadashi Aoto, Shinichi Maeta +3 more | 2016-08-09 |
| 9343346 | Electrostatic chuck apparatus | Kazunori Ishimura, Takashi Satou, Ryuuji Hayahara, Takeshi Watanabe, Yoshiaki Moriya +1 more | 2016-05-17 |
| 9269600 | Electrostatic chuck device | Yukio Miura, Kazunori Ishimura | 2016-02-23 |