Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9484180 | Plasma processing method and plasma processing apparatus | Manabu Iwata | 2016-11-01 |
| 9484232 | Zone temperature control structure | — | 2016-11-01 |
| 9412635 | Electrostatic chuck device | Kaoru Oohashi, Tomoyuki Takahashi, Tadashi Aoto, Mamoru Kosakai, Shinichi Maeta +3 more | 2016-08-09 |