Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9437402 | Plasma processor and plasma processing method | Akihiro Kikuchi, Satoshi Kayamori, Shinya Shima, Yuichiro Sakamoto, Kimihiro Higuchi +3 more | 2016-09-06 |
| 9412635 | Electrostatic chuck device | Yasuharu Sasaki, Tomoyuki Takahashi, Tadashi Aoto, Mamoru Kosakai, Shinichi Maeta +3 more | 2016-08-09 |