SS

Shinya Shima

TL Tokyo Electron Limited: 1 patents #252 of 758Top 35%
📍 Yamanashi, JP: #114 of 284 inventorsTop 45%
Overall (2016): #228,010 of 481,213Top 50%
1
Patents 2016

Issued Patents 2016

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9437402 Plasma processor and plasma processing method Akihiro Kikuchi, Satoshi Kayamori, Yuichiro Sakamoto, Kimihiro Higuchi, Kaoru Oohashi +3 more 2016-09-06