Issued Patents 2016
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520294 | Atomic layer etch process using an electron beam | Ankur Agarwal, Shahid Rauf | 2016-12-13 |
| 9508530 | Plasma processing chamber with flexible symmetric RF return strap | Mike Kellogg | 2016-11-29 |
| 9449796 | Plasma processing system including a symmetrical remote plasma source for minimal ion energy | Ankur Agarwal, Ajit Balakrishna | 2016-09-20 |
| 9418859 | Plasma-enhanced etching in an augmented plasma processing system | Eric A. Hudson, Andrew D. Bailey, III | 2016-08-16 |
| 9401264 | Control of impedance of RF delivery path | Alexei Marakhtanov, Ken Lucchesi, Luc Albarede | 2016-07-26 |
| 9396908 | Systems and methods for controlling a plasma edge region | Alexei Marakhtanov | 2016-07-19 |
| 9396910 | Heat transfer plate for a showerhead electrode assembly of a capacitively coupled plasma processing apparatus | Sang Ki Nam, Ryan Bise | 2016-07-19 |
| 9337000 | Control of impedance of RF return path | Alexei Marakhtanov, Ken Lucchesi, Luc Albarede | 2016-05-10 |
| 9330927 | System, method and apparatus for generating pressure pulses in small volume confined process reactor | Harmeet Singh, Sang Ki Nam | 2016-05-03 |
| 9287096 | Methods and apparatus for a hybrid capacitively-coupled and an inductively-coupled plasma processing system | Alexei Marakhtanov, Eric A. Hudson, Neil Benjamin | 2016-03-15 |
| 9267208 | Methods for controlling plasma constituent flux and deposition during semiconductor fabrication and apparatus for implementing the same | — | 2016-02-23 |
| 9263240 | Dual zone temperature control of upper electrodes | Alexei Marakhtanov, Ryan Bise, Lumin Li, Sang Ki Nam, Jim Rogers +5 more | 2016-02-16 |
| 9251999 | Capacitively-coupled plasma processing system having a plasma processing chamber for processing a substrate | Eric A. Hudson, Alexei Marakhtanov, Andreas Fischer | 2016-02-02 |
| 9245718 | Showerhead electrode assembly in a capacitively coupled plasma processing apparatus | Sang Ki Nam, Ryan Bise | 2016-01-26 |
| 9245720 | Methods and apparatus for detecting azimuthal non-uniformity in a plasma processing system | Alexei Marakhtanov | 2016-01-26 |
| 9230779 | Methods and apparatus for correcting for non-uniformity in a plasma processing system | Sang Ki Nam | 2016-01-05 |