Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9412613 | Development of high etch selective hardmask material by ion implantation into amorphous carbon films | Abhijit Basu Mallick, Ludovic Godet, Yongmei Chen, Jun Xue, Mukund Srinivasan +2 more | 2016-08-09 |
| 9406509 | Deposition of heteroatom-doped carbon films | Abhijit Basu Mallick, Mukund Srinivasan | 2016-08-02 |
| 9337051 | Method for critical dimension reduction using conformal carbon films | Bencherki Mebarki, Bok Hoen Kim, Deenesh Padhi, Li Yan Miao, Christopher Dennis Bencher +4 more | 2016-05-10 |
| 9257330 | Ultra-thin structure to protect copper and method of preparation | Amit Chatterjee, Geetika Bajaj, He Ren, Tapash Chakraborty, Srinivas D. Nemani +3 more | 2016-02-09 |