Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9518916 | Compressive sensing for metrology | Stilian Ivanov Pandev, Alexander Kuznetsov, Gregory Brady, Andrei V. Shchegrov, John J. Hench | 2016-12-13 |
| 9490182 | Measurement of multiple patterning parameters | Andrei V. Shchegrov, Shankar Krishnan, Kevin Peterlinz, Thaddeus Gerard Dziura, Stilian Ivanov Pandev | 2016-11-08 |
| 9255895 | Angle-resolved antisymmetric scatterometry | Daniel Kandel, Vladimir Levinski | 2016-02-09 |