Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9454072 | Method and system for providing a target design displaying high sensitivity to scanner focus change | Yoel Feler, Daniel Kandel | 2016-09-27 |
| 9255895 | Angle-resolved antisymmetric scatterometry | Daniel Kandel, Noam Sapiens | 2016-02-09 |