Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9512985 | Systems for providing illumination in optical metrology | Gregory Brady, Andrei V. Shchegrov, Lawrence D. Rotter, Derrick Shaughnessy, Anatoly Shchemelinin +16 more | 2016-12-06 |
| 9454072 | Method and system for providing a target design displaying high sensitivity to scanner focus change | Vladimir Levinski, Yoel Feler | 2016-09-27 |
| 9255895 | Angle-resolved antisymmetric scatterometry | Vladimir Levinski, Noam Sapiens | 2016-02-09 |