Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478434 | Chlorine-based hardmask removal | Xikun Wang, Mandar B. Pandit, Zhenjiang Cui, Anchuan Wang, Nitin K. Ingle +1 more | 2016-10-25 |
| 9449843 | Selectively etching metals and metal nitrides conformally | Nitin K. Ingle, David Thompson, Jeffrey W. Anthis, David Knapp, Benjamin Schmiege | 2016-09-20 |
| 9359673 | Apparatus and method for atomic layer deposition | Hyungsuk Alexander Yoon, Fritz Redeker, John M. Boyd, Yezdi Dordi | 2016-06-07 |
| 9355863 | Non-local plasma oxide etch | Zhijun Chen, Seung Ho Park, Anchuan Wang, Nitin K. Ingle | 2016-05-31 |
| 9355862 | Fluorine-based hardmask removal | Mandar B. Pandit, Xikun Wang, Zhenjiang Cui, Anchuan Wang, Nitin K. Ingle | 2016-05-31 |
| 9275834 | Selective titanium nitride etch | Seung Ho Park, Anchuan Wang, Nitin K. Ingle | 2016-03-01 |
| 9236265 | Silicon germanium processing | Nitin K. Ingle, Anchuan Wang, Jingjing Xu | 2016-01-12 |