Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478421 | Optically tuned hardmask for multi-patterning applications | Christopher Dennis Bencher, Daniel Lee Diehl, Yong Cao, Tingjun Xu, Weimin Zeng +1 more | 2016-10-25 |
| 9411237 | Resist hardening and development processes for semiconductor device manufacturing | Peng Xie, Christopher Dennis Bencher, Timothy Michaelson, Subhash Deshmukh | 2016-08-09 |
| 9343309 | Lateral oxidation process flows | Mangesh Ashok BANGAR, Liyan Miao | 2016-05-17 |
| 9337051 | Method for critical dimension reduction using conformal carbon films | Bencherki Mebarki, Bok Hoen Kim, Deenesh Padhi, Li Yan Miao, Pramit Manna +4 more | 2016-05-10 |