Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9523912 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, manufacturing method of electronic device, electronic device and compound | Akinori Shibuya, Toshiaki Fukuhara, Hajime Furutani, Michihiro SHIRAKAWA | 2016-12-20 |
| 9482947 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, manufacturing method of electronic device and electronic device | Shuhei Yamaguchi, Hidenori Takahashi, Michihiro SHIRAKAWA, Shoichi SAITOH, Fumihiro YOSHINO | 2016-11-01 |
| 9454079 | Actinic ray- or radiation-sensitive resin composition, actinic ray- or radiation-sensitive film and method of forming pattern | Akinori Shibuya, Yoko TOKUGAWA, Tomoki Matsuda, Junichi Ito, Toshiaki Fukuhara +4 more | 2016-09-27 |
| 9405197 | Pattern forming method, method for manufacturing electronic device, and electronic device | Akinori Shibuya, Tomoki Matsuda, Toshiaki Fukuhara, Akiyoshi GOTO | 2016-08-02 |
| 9316910 | Pattern forming method, actinic-ray-sensitive or radiation-sensitive resin composition, and resist film | Hidenori Takahashi, Shuhei Yamaguchi, Shoichi SAITOH, Michihiro SHIRAKAWA, Fumihiro YOSHINO | 2016-04-19 |
| 9250519 | Pattern forming method and actinic ray-sensitive or radiation-sensitive resin composition for use in the method | Akinori Shibuya, Akiyoshi GOTO, Tomoki Matsuda, Toshiaki Fukuhara | 2016-02-02 |