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Actinic ray- or radiation-sensitive resin composition, actinic ray- or radiation-sensitive film and method of forming pattern |
Akinori Shibuya, Yoko TOKUGAWA, Junichi Ito, Shohei Kataoka, Toshiaki Fukuhara +4 more |
2016-09-27 |
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Pattern forming method, method for manufacturing electronic device, and electronic device |
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| 9316911 |
Actinic-ray- or radiation-sensitive resin composition, actinic-ray- or radiation-sensitive film therefrom and method of forming pattern using the composition |
Yoko TOKUGAWA, Akinori Shibuya |
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Pattern forming method and actinic ray-sensitive or radiation-sensitive resin composition for use in the method |
Shohei Kataoka, Akinori Shibuya, Akiyoshi GOTO, Toshiaki Fukuhara |
2016-02-02 |