Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9523912 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, manufacturing method of electronic device, electronic device and compound | Shohei Kataoka, Akinori Shibuya, Hajime Furutani, Michihiro SHIRAKAWA | 2016-12-20 |
| 9454079 | Actinic ray- or radiation-sensitive resin composition, actinic ray- or radiation-sensitive film and method of forming pattern | Akinori Shibuya, Yoko TOKUGAWA, Tomoki Matsuda, Junichi Ito, Shohei Kataoka +4 more | 2016-09-27 |
| 9405197 | Pattern forming method, method for manufacturing electronic device, and electronic device | Akinori Shibuya, Shohei Kataoka, Tomoki Matsuda, Akiyoshi GOTO | 2016-08-02 |
| 9250519 | Pattern forming method and actinic ray-sensitive or radiation-sensitive resin composition for use in the method | Shohei Kataoka, Akinori Shibuya, Akiyoshi GOTO, Tomoki Matsuda | 2016-02-02 |