Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9523912 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, manufacturing method of electronic device, electronic device and compound | Shohei Kataoka, Akinori Shibuya, Toshiaki Fukuhara, Michihiro SHIRAKAWA | 2016-12-20 |