Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9454079 | Actinic ray- or radiation-sensitive resin composition, actinic ray- or radiation-sensitive film and method of forming pattern | Akinori Shibuya, Tomoki Matsuda, Junichi Ito, Shohei Kataoka, Toshiaki Fukuhara +4 more | 2016-09-27 |
| 9316911 | Actinic-ray- or radiation-sensitive resin composition, actinic-ray- or radiation-sensitive film therefrom and method of forming pattern using the composition | Tomoki Matsuda, Akinori Shibuya | 2016-04-19 |