Issued Patents 2016
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9523913 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, method for manufacturing electronic device, and electronic device | Keita Kato, Michihiro SHIRAKAWA, Shoichi SAITOH, Fumihiro YOSHINO | 2016-12-20 |
| 9513547 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, method for manufacturing electronic device, and electronic device | Sou Kamimura, Keita Kato | 2016-12-06 |
| 9496370 | Manufacturing method of semiconductor apparatus and semiconductor apparatus | Yasushi Niimura, Sota WATANABE, Takumi Fujimoto, Takeyoshi Nishimura, Takamasa Wakabayashi | 2016-11-15 |
| 9482947 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, manufacturing method of electronic device and electronic device | Shuhei Yamaguchi, Michihiro SHIRAKAWA, Shohei Kataoka, Shoichi SAITOH, Fumihiro YOSHINO | 2016-11-01 |
| 9463275 | Infusion pump | Mitsutaka Ueda, Ryoichi Akai | 2016-10-11 |
| 9423689 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, manufacturing method of electronic device and electronic device | Shuhei Yamaguchi, Michihiro SHIRAKAWA, Fumihiro YOSHINO | 2016-08-23 |
| 9417523 | Pattern forming method, actinic ray-sensitive or radiation-sensitive composition used therein, resist film, manufacturing method of electronic device using the same, and electronic device | — | 2016-08-16 |
| 9417528 | Pattern forming method, multi-layered resist pattern, multi-layered film for organic solvent development, resist composition, method for manufacturing electronic device, and electronic device | Michihiro SHIRAKAWA, Keita Kato, Tadahiro ODANI, Atsushi Nakamura, Kaoru Iwato | 2016-08-16 |
| 9383645 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, actinic ray-sensitive or radiation-sensitive film, manufacturing method of electronic device, and electronic device | Shuhei Yamaguchi, Kei Yamamoto, Fumihiro YOSHINO | 2016-07-05 |
| 9327611 | Temperature elevating apparatus of secondary battery and vehicle equipped with same | Yuji Nishi, Masatoshi Tazawa, Masanobu Matsusaka, Makoto Ishikura | 2016-05-03 |
| 9323683 | Storage apparatus and method for controlling internal process | Toshihiko Suzuki, Emi Cho | 2016-04-26 |
| 9316910 | Pattern forming method, actinic-ray-sensitive or radiation-sensitive resin composition, and resist film | Shohei Kataoka, Shuhei Yamaguchi, Shoichi SAITOH, Michihiro SHIRAKAWA, Fumihiro YOSHINO | 2016-04-19 |
| 9312379 | Manufacturing method of semiconductor apparatus and semiconductor apparatus | Yasushi Niimura, Sota WATANABE, Takumi Fujimoto, Takeyoshi Nishimura, Takamasa Wakabayashi | 2016-04-12 |
| 9250532 | Pattern forming method, multi-layered resist pattern, multi-layered film for organic solvent development, resist composition, method for manufacturing electronic device, and electronic device | Keita Kato, Michihiro SHIRAKAWA, Tadahiro ODANI, Atsushi Nakamura, Kaoru Iwato | 2016-02-02 |
| 9244344 | Actinic ray-sensitive or radiation-sensitive resin composition, and, resist film, pattern forming method, electronic device manufacturing method, and electronic device, each using the same | Kosuke Koshijima, Shuhei Yamaguchi, Kei Yamamoto | 2016-01-26 |
| 9235117 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, manufacturing method of electronic device, and electronic device | Junichi Ito, Shuhei Yamaguchi, Kei Yamamoto | 2016-01-12 |