Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9482947 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, manufacturing method of electronic device and electronic device | Hidenori Takahashi, Michihiro SHIRAKAWA, Shohei Kataoka, Shoichi SAITOH, Fumihiro YOSHINO | 2016-11-01 |
| 9423689 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, manufacturing method of electronic device and electronic device | Hidenori Takahashi, Michihiro SHIRAKAWA, Fumihiro YOSHINO | 2016-08-23 |
| 9417083 | Route creation device | — | 2016-08-16 |
| 9383645 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, actinic ray-sensitive or radiation-sensitive film, manufacturing method of electronic device, and electronic device | Hidenori Takahashi, Kei Yamamoto, Fumihiro YOSHINO | 2016-07-05 |
| 9316910 | Pattern forming method, actinic-ray-sensitive or radiation-sensitive resin composition, and resist film | Shohei Kataoka, Hidenori Takahashi, Shoichi SAITOH, Michihiro SHIRAKAWA, Fumihiro YOSHINO | 2016-04-19 |
| 9244344 | Actinic ray-sensitive or radiation-sensitive resin composition, and, resist film, pattern forming method, electronic device manufacturing method, and electronic device, each using the same | Kosuke Koshijima, Hidenori Takahashi, Kei Yamamoto | 2016-01-26 |
| 9235117 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, manufacturing method of electronic device, and electronic device | Junichi Ito, Hidenori Takahashi, Kei Yamamoto | 2016-01-12 |