Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9523913 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, method for manufacturing electronic device, and electronic device | Keita Kato, Michihiro SHIRAKAWA, Hidenori Takahashi, Fumihiro YOSHINO | 2016-12-20 |
| 9482947 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, manufacturing method of electronic device and electronic device | Shuhei Yamaguchi, Hidenori Takahashi, Michihiro SHIRAKAWA, Shohei Kataoka, Fumihiro YOSHINO | 2016-11-01 |
| 9316910 | Pattern forming method, actinic-ray-sensitive or radiation-sensitive resin composition, and resist film | Shohei Kataoka, Hidenori Takahashi, Shuhei Yamaguchi, Michihiro SHIRAKAWA, Fumihiro YOSHINO | 2016-04-19 |