Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9417528 | Pattern forming method, multi-layered resist pattern, multi-layered film for organic solvent development, resist composition, method for manufacturing electronic device, and electronic device | Michihiro SHIRAKAWA, Keita Kato, Atsushi Nakamura, Hidenori Takahashi, Kaoru Iwato | 2016-08-16 |
| 9250532 | Pattern forming method, multi-layered resist pattern, multi-layered film for organic solvent development, resist composition, method for manufacturing electronic device, and electronic device | Keita Kato, Michihiro SHIRAKAWA, Atsushi Nakamura, Hidenori Takahashi, Kaoru Iwato | 2016-02-02 |