Issued Patents 2011
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8082124 | Method and system for diagnosing abnormal plasma discharge | Takaya Miyano, Toshiyuki Matsumoto, Naoki Ikeuchi | 2011-12-20 |
| 8062432 | Cleaning method for turbo molecular pump | Eiichi Sugawara | 2011-11-22 |
| 8058186 | Components for substrate processing apparatus and manufacturing method thereof | Kouji Mitsuhashi, Akira Uedono | 2011-11-15 |
| 8052798 | Particle removal apparatus and method and plasma processing apparatus | Hiroshi Nagaike | 2011-11-08 |
| 8052376 | Turbo-molecular pump, substrate processing apparatus, and method for suppressing attachment of depositions to turbo-molecular pump | Jun Yamawaku | 2011-11-08 |
| 8048235 | Gate valve cleaning method and substrate processing system | Hiroyuki Nakayama, Keisuke Kondoh, Hiroki Oka | 2011-11-01 |
| 8043971 | Plasma processing apparatus, ring member and plasma processing method | Yasuharu Sasaki, Hiroshi Nagaike | 2011-10-25 |
| 8012303 | Container cleanliness measurement apparatus and method, and substrate processing system | Toshiya Matsuda | 2011-09-06 |
| 7976637 | Substrate processing system, substrate surface processing apparatus, substrate surface inspecting apparatus, substrate surface inspecting method, and storage medium storing program for implementing the method | Hiroshi Nagaike | 2011-07-12 |
| 7969572 | Particle monitor system and substrate processing apparatus | Takashi Enomoto | 2011-06-28 |
| 7942975 | Ceramic sprayed member-cleaning method | Kouji Mitsuhashi | 2011-05-17 |
| 7937178 | Charging method for semiconductor device manufacturing apparatus, storage medium storing program for implementing the charging method, and semiconductor device manufacturing apparatus implementing the charging method | — | 2011-05-03 |
| 7927066 | Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component | Takahiro Murakami, Yoshiyuki Kobayashi, Tetsuji Sato, Eiichi Sugawara, Shosuke Endoh +1 more | 2011-04-19 |
| 7913351 | Cleaning apparatus and cleaning method | — | 2011-03-29 |
| 7913702 | Substrate cleaning method, substrate cleaning apparatus, substrate processing system, substrate cleaning program and storage medium | — | 2011-03-29 |
| 7883779 | Vacuum apparatus including a particle monitoring unit, particle monitoring method and program, and window member for use in the particle monitoring | Hiroyuki Nakayama | 2011-02-08 |