Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8072420 | Input device equipped with illumination mechanism | — | 2011-12-06 |
| 8038837 | Ring-shaped component for use in a plasma processing, plasma processing apparatus and outer ring-shaped member | Nobuhiro Sato | 2011-10-18 |
| 8016087 | Fluid damper | Hideo Araseki | 2011-09-13 |
| 7927066 | Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component | Tsuyoshi Moriya, Yoshiyuki Kobayashi, Tetsuji Sato, Eiichi Sugawara, Shosuke Endoh +1 more | 2011-04-19 |
| 7875249 | Reactor-integrated syphon | Koubun Kyo, Toshiyuki Suda | 2011-01-25 |