Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8083891 | Plasma processing apparatus and the upper electrode unit | — | 2011-12-27 |
| 8077761 | Data transmission and reception module, and method of adjusting reception threshold value thereof | — | 2011-12-13 |
| 7927066 | Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component | Tsuyoshi Moriya, Takahiro Murakami, Yoshiyuki Kobayashi, Eiichi Sugawara, Shosuke Endoh +1 more | 2011-04-19 |