Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8057600 | Method and apparatus for an improved baffle plate in a plasma processing system | Shinya Nishimoto, Hiroyuki Nakayama | 2011-11-15 |
| 8058186 | Components for substrate processing apparatus and manufacturing method thereof | Tsuyoshi Moriya, Akira Uedono | 2011-11-15 |
| 7942975 | Ceramic sprayed member-cleaning method | Tsuyoshi Moriya | 2011-05-17 |
| 7892361 | In-chamber member, a cleaning method therefor and a plasma processing apparatus | Nobuyuki Nagayama, Hiroyuki Nakayama | 2011-02-22 |