Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7892361 | In-chamber member, a cleaning method therefor and a plasma processing apparatus | Kouji Mitsuhashi, Hiroyuki Nakayama | 2011-02-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7892361 | In-chamber member, a cleaning method therefor and a plasma processing apparatus | Kouji Mitsuhashi, Hiroyuki Nakayama | 2011-02-22 |