Issued Patents 2011
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8057600 | Method and apparatus for an improved baffle plate in a plasma processing system | Shinya Nishimoto, Kouji Mitsuhashi | 2011-11-15 |
| 8053014 | Liquid seasoning | Shin Koike, Koichi Okisaka, Jun Kohori, Yoko Seo, Noboru Shirahata +2 more | 2011-11-08 |
| 8048235 | Gate valve cleaning method and substrate processing system | Tsuyoshi Moriya, Keisuke Kondoh, Hiroki Oka | 2011-11-01 |
| 8029871 | Method for producing silica aerogel coating | Kazuhiro Yamada, Yasuhiro Sakai, Maki Yamada | 2011-10-04 |
| 7931940 | Production method of silica aerogel film, anti-reflection coating and optical element | Mineta SUZUKI, Takanobu Shiokawa, Kazuhiro Yamada, Hideki Yamaguchi, Ayako Maruta | 2011-04-26 |
| 7892361 | In-chamber member, a cleaning method therefor and a plasma processing apparatus | Nobuyuki Nagayama, Kouji Mitsuhashi | 2011-02-22 |
| 7883779 | Vacuum apparatus including a particle monitoring unit, particle monitoring method and program, and window member for use in the particle monitoring | Tsuyoshi Moriya | 2011-02-08 |