Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048235 | Gate valve cleaning method and substrate processing system | Tsuyoshi Moriya, Hiroyuki Nakayama, Hiroki Oka | 2011-11-01 |
| 7942622 | Transfer/alignment method in vacuum processing apparatus, vacuum processing apparatus and computer storage medium | Hiroshi Koizumi | 2011-05-17 |