Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048235 | Gate valve cleaning method and substrate processing system | Tsuyoshi Moriya, Hiroyuki Nakayama, Keisuke Kondoh | 2011-11-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048235 | Gate valve cleaning method and substrate processing system | Tsuyoshi Moriya, Hiroyuki Nakayama, Keisuke Kondoh | 2011-11-01 |