Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8052798 | Particle removal apparatus and method and plasma processing apparatus | Tsuyoshi Moriya | 2011-11-08 |
| 8043971 | Plasma processing apparatus, ring member and plasma processing method | Yasuharu Sasaki, Tsuyoshi Moriya | 2011-10-25 |
| 7976637 | Substrate processing system, substrate surface processing apparatus, substrate surface inspecting apparatus, substrate surface inspecting method, and storage medium storing program for implementing the method | Tsuyoshi Moriya | 2011-07-12 |