Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8052376 | Turbo-molecular pump, substrate processing apparatus, and method for suppressing attachment of depositions to turbo-molecular pump | Tsuyoshi Moriya | 2011-11-08 |
| 8034720 | Substrate processing method and substrate processing apparatus | Eiichi Nishimura, Chie Kato | 2011-10-11 |