Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8043472 | Substrate processing apparatus and focus ring | Masaaki Miyagawa | 2011-10-25 |
| 8034720 | Substrate processing method and substrate processing apparatus | Chie Kato, Jun Yamawaku | 2011-10-11 |
| 7993540 | Substrate processing method and substrate processing apparatus | — | 2011-08-09 |
| 7985699 | Substrate processing method and storage medium | — | 2011-07-26 |
| 7892986 | Ashing method and apparatus therefor | Shigeru Tahara, Kumiko Yamazaki | 2011-02-22 |
| 7871908 | Method of manufacturing semiconductor device | Koichi Yatsuda | 2011-01-18 |