Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8026150 | Semiconductor device manufacturing method and storage medium | Reiko SASAHARA, Jun Tamura | 2011-09-27 |
| 7964511 | Plasma ashing method | Naotsugu Hoshi | 2011-06-21 |
| 7892986 | Ashing method and apparatus therefor | Eiichi Nishimura, Kumiko Yamazaki | 2011-02-22 |
| 7882800 | Ring mechanism, and plasma processing device using the ring mechanism | Akira Koshiishi, Mitsuru Hashimoto, Hideaki Tanaka, Kunihiko Hinata, Jun Ooyabu | 2011-02-08 |