Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7988816 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Noriyuki Kobayashi, Chishio Koshimizu, Ryuji Ohtani +11 more | 2011-08-02 |
| 7951262 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Noriyuki Kobayashi, Chishio Koshimizu, Ryuji Ohtani +10 more | 2011-05-31 |
| 7882800 | Ring mechanism, and plasma processing device using the ring mechanism | Akira Koshiishi, Mitsuru Hashimoto, Hideaki Tanaka, Shigeru Tahara, Jun Ooyabu | 2011-02-08 |