Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7988816 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Chishio Koshimizu, Ryuji Ohtani +11 more | 2011-08-02 |
| 7951262 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Chishio Koshimizu, Ryuji Ohtani +10 more | 2011-05-31 |
| 7943524 | Method of etching and etching apparatus | Kenji Adachi | 2011-05-17 |
| 7936466 | Information processing apparatus and its control method for managing distributed processing of at least one of the device information and operation states | — | 2011-05-03 |
| 7872769 | Divided job scheduler | Masamichi Akashi, Yukihiko Shimizu, Masataka Yasuda, Shinichiro Maekawa, Takeshi Namikata +4 more | 2011-01-18 |