Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8034213 | Plasma processing apparatus and plasma processing method | Naoki Matsumoto, Yoshinobu Hayakawa, Hidetoshi Hanaoka, Noriaki Kodama, Manabu Iwata +1 more | 2011-10-11 |
| 7993489 | Capacitive coupling plasma processing apparatus and method for using the same | Naoki Matsumoto, Akira Koshiishi | 2011-08-09 |
| 7988816 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Ryuji Ohtani +11 more | 2011-08-02 |
| 7956310 | Stage, substrate processing apparatus, plasma processing apparatus, control method for stage, control method for plasma processing apparatus, and storage media | Tomohiro Suzuki | 2011-06-07 |
| 7951262 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Ryuji Ohtani +10 more | 2011-05-31 |
| 7952717 | Temperature measuring apparatus and temperature measuring method | Jun Abe, Tatsuo Matsudo | 2011-05-31 |