Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8034213 | Plasma processing apparatus and plasma processing method | Naoki Matsumoto, Hidetoshi Hanaoka, Noriaki Kodama, Chishio Koshimizu, Manabu Iwata +1 more | 2011-10-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8034213 | Plasma processing apparatus and plasma processing method | Naoki Matsumoto, Hidetoshi Hanaoka, Noriaki Kodama, Chishio Koshimizu, Manabu Iwata +1 more | 2011-10-11 |